NGK CO₂ Bubbler 純水抗靜電處理系統
透過注入微量 CO₂ 到 DI 水中，有效消除靜電問題，廣泛應用於半導體清洗製程。
純水抗靜電處理系統 ( CO2 Bubbler )
「 MEGCON 」 超純水帯電防止器是透過特殊的中空纖維膜將二氧化碳氣體溶解在超純水中來控制超純水電阻率值的設備 。透過降低超純水的電阻率值並賦予其導電性可以防止靜電引起的缺陷。
透過本系統能使純水的電阻值被控制在0.1~2 MΩ·cm。
此外，MEGCON的優點是不會產生二次汙染及氣泡，不像傳統方式將CO2氣體或金屬鎂直接融入純水中，產生二次汙染。
應用領域 : 切割 (Dicing)、研磨(Grinding)、高壓清洗(Cleaning)、Scrubber cleaning、Liquid crystal process、Scrubber、Mask and reticle cleaning
如需進一步的資料與需求，請來信至： info@ntl.com.tw ，或搜尋 LINE ID： @neotrend 加入好友，或致電 (02)2365-7517 將有專人為您服務！
| Specification of MEGCON Ⅱ | |||||||
| Series | General-purpose series PRCII-(model numbers Listed below) | CE marking series *4 FRCII-(model numbers listed below) | |||||
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Connection port |
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(AC100-120V unless specifically requested ) |
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braided hose |
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Instruction manual ,inspection results certificate100-120 V power:Power cord(for AC100-120V )+plug 200-240 V power:Power cord ( for AC200-240V )(For cases other than the above ,the necessary parts must be prepared by the customer.) |
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1: S type includes a 2-color lamp with buzzer + casters with levelers.
ES type includes a 2-color lamp with buzzer + data output terminal box + data storage system. 2: The minimum specific resistance is the final value at a flow of approximately 500 L/h. 3: The following additional accessories are available. It is recommended that a spare cell be kept on hand at all times in case of trouble. ■ Spare cell ■ Specific resistance certificate ■ Specific resistance sensor for point-of-use monitoring ■ Data storage system (compatible OS: Windows2000, XP, Vista; connection: d-sub 9-pin) 4: CE marking is a safety standard and labeling system that was established by EU directive. 5. The specifications and other information listed here may be changed without notice. ● To ensure safe use of the product ● Be sure to read the instruction manual before using the product, and to use the product correctly. ● Observe the most recent laws of the country where the product is installed that are related to high-pressure gas devices such as the CO2 gas cylinder used to supply CO2 gas, and manage the safety of these gas devices, including by performing regular inspections. |
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| Ultrapure Water Cleaning |
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Electrostatic damage When there is friction between nonconductors of different materials,static electricity is generated.
The causes of static electricity include friction, separation, impact, streaming, etc. There is much danger of static electricity generation in the cleaning process. ●Electrostatic discharge damage Fine wiring can be damaged by static electricity. The wiring and transistors in liquid crystal displays (TFT) can be damaged. Damage to even a single location in the minute pattern can lead to quality problems occuring for the entire product. ●Particle reattachment When static electricity is formed, not only is it difficult to separate foreign particles,but the problem of foreign particles that have already been detached being attracted and attached again also occurs. here is also the problem of cutting particles becoming reattached to important parts of the wafer during the dicing process, resulting in defects occurring in later processes such as bonding. Applications：1. Mask, reticle 2. Wafer process 3. Dicing process 4. Liquid crystal process 5. CMP process Etc. Resistivity, wafer temperature , flow Ultrapure water Resistivity at point Flow Pc Cleaner |
| Features of MEGCON Ⅱ |
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The MEGCON Ⅱ aims to increase the efficiency of cleaning processes and has improved functionality.
■ Automatic control system The following control methods can be used according to the application,allowing the device to be utilized in its optimum state. ● Sensor measurement control ● Dissociation calculation control ● Flow input control. ■ Membrane drying mechanism Maintenance of performance and the life of the membrane have been greatly improved by installing an obstruction removal mechanism that uses vapor in the gas inlet. ■ Point of use monitor(optional) The actual resistivity at the point of use of the cleaning operation can be measured. ■ As part of our new corresponding product series, we have released MEGCON II with CE marking. ■ Data storage system(optional) Data for resistivity, temperature and flow can be fed into a personal computer and displayed on a graph. The data is stored and can be utilized in quality control of cleaning operations. If the carbon dioxide gas level alarm has been installed,the gas level can be viewed on screen. |